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1. Treatment

Wet cleaning and vaccum drying
We cleaned up the electro-conductive deposition on the ceramic surface

 

2. Properties

  Before Cleaning After Cleaning
Flatness of Surface 7.3 µm not changed
Heater terminal 1-2 15.9 Ω not changed
Heater terminal 3-4 4.6 Ω not changed
TC Terminal 1 7.5 Ω not changed
TC Terminal 2 8.9 Ω not changed
ESC Terminal 0.18 µA
(25 °C DC700V at non-wafer)
0.05 µA
(25°C DC700V at non-wafer)

Surface Resistance
(Click image to enlarge)

Enlarged Photo Showing Effects of Cleaning

 

 

 

 

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